Rapid thermal processing of silicon wafers with emissivity patterns
Published in Journal of Electronic Materials, 2006
Recommended citation: M. Rabus, A. Fiory, N. Ravindra, P. Frisella, A. Agarwal, T. Sorsch, J. Miner, E. Ferry, F. Klemens, R. Cirelli, W. Mansfield, "Rapid thermal processing of silicon wafers with emissivity patterns." Journal of Electronic Materials, 2006.
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